ALD简介
原子层沉积技术(Atomic Layer Deposition,简称ALD)是一种在纳米尺度上进行薄膜沉积的先进技术。通过将物质以单原子形式一层一层的镀在基底表面,拥有优异的三维共形性、大面积成膜的均匀性和精确控制膜厚等特点。

ALD应用

ALD在能源领域应用
2009年,Miyaska课题组将钙钛矿材料MAPbI3用作燃料敏化太阳能电池的光伏活性层,正式开启了钙钛矿太阳能电池的新纪元。ALD凭借其均匀成膜性、精准控制厚度和保形性等多种优势,在光伏领域中发挥着重要作用。除此之外,ALD技术还可用于锂电池薄膜涂层,提高电池性能。


ALD在泛半导体应用
随着泛半导体行业的发展,对微型化和集成化要求越来越高,尺寸缩小至亚微米和纳米量级,ALD作为一种高精度薄膜沉积技术,可用于晶体管栅极电介质层(高K材料)、金属栅电极、有机发光显示器涂层、铜互联扩散阻挡层、DRAM电介质层、微流体和MEMS涂层、传感器等众多领域。

ALD在光学领域应用
由于 ALD 具有的三维共形沉积和大面积均匀性特点,已成功应用于高质量光学薄膜、增透膜、折射率可调的光学薄膜、波状多层膜,改善了光子晶体的光学性质和可控性,增加了光子晶体在未来光学器件中的应用潜力。

公司致力于ALD高纯半导体薄膜前驱体材料的自主研发和生产,成立以来,已陆续向多家半导体客户提供了百余种前驱体新材料,包括高纯硅基前驱体系列、High-k前驱体系列产品,部分新品已被客户用于5nm以下制程薄膜设备。我们致力为客户提供优质的产品并建立互信、长久的合作关系,产品具有自主知识产权且原材料国产化,打破国外垄断的同时保证供应链的安全。研峰科技愿与国内芯片、高端显示、光伏新能源等高端客户一起携手,解决高端半导体材料的把脖子难题,早日实现进口替代。
Chemical Name | (Trimethyl)methylcyclopentadienylplatinum(IV), (MeCp)PtMe3 |
Synonym |
(Trimethyl)methylcyclopentadienylplatinum(IV)
Methylcyclopentadienyl-tridimethyl-platinum
(Methylcyclopentadienyl)trimethylplatinum
MeCpPtMe3
Platinum, trimethyl[(1,2,3,4,5-η)-1-methyl-2,4-cyclopentadien-1-yl]-
三甲基(甲基环戊二烯基)铂(IV) |
PubChem Substance ID | 24883390 |
CAS Number | 94442-22-5 |
MDL Number | MFCD00079665 |
Chemical Name Translation | 三甲基(甲基环戊二烯)铂(IV) |
InChIKey | AGQKROMSWCHOND-UHFFFAOYSA-N |
Hazard Codes |
T+,N |
WGK Germany | 3 |
GHS Symbol
Precautionary statements | |
- P264 Wash hands thoroughly after handling. 处理后要彻底洗净双手。
- P273 Avoid release to the environment. 避免释放到环境中。
- P301+P310
- P302+P350
- P280 Wear protective gloves/protective clothing/eye protection/face protection. 戴防护手套/防护服/眼睛的保护物/面部保护物。
- P310 Immediately call a POISON CENTER or doctor/physician. 立即呼救解毒中心或医生/医师。
- P391 Collect spillage. Hazardous to the aquatic environment 收集对水环境有危害的泄漏物。
- P301+P310+P330
- P302+P352+P310
- P333+P313
|
Hazard statements | |
- H400 Verytoxictoaquaticlife 对水生生物毒性非常大。
- H317 May cause an allergic skin reaction 可能导致皮肤过敏
- H300+H310
|
Personal Protective Equipment |
Eyeshields, Faceshields, full-face particle respirator type N100 (US), Gloves, respirator cartridge type N100 (US), type P1 (EN143) respirator filter, type P3 (EN 143) respirator cartridges |
Signal word |
Danger |
Safety Statements | |
- S61 Avoid release to the environment. Refer to special instructions/safety data sheet 避免释放到环境中,参考特别指示/安全收据说明书;
- S45 In case of accident or if you feel unwell seek medical advice immediately (show the label where possible) 发生事故时或感觉不适时,立即求医(可能时出示标签);
- S28 After contact with skin, wash immediately with plenty of ... (to be specified by the manufacturer) 皮肤接触后,立即用大量…(由生产厂家指定)冲洗;
- S36/37 Wear suitable protective clothing and gloves 穿戴适当的防护服和手套;
|
Risk Statements | |
- R50 Very toxic to aquatic organisms 对水生生物极毒
- R43 May cause sensitisation by skin contact 皮肤接触会产生过敏反应
- R27/28 Very toxic in contact with skin and if swallowed 皮肤接触及吞食都有剧毒
|
Restrict |
- |
{uni_hamburg} Short: III/35C4
Title: Nuclear Magnetic Resonance (NMR) Data: Chemical Shifts and Coupling Constants for Hydrogen-1, Part 4: Inorganic and Organometallic Compounds
Author: Gupta, R.R.; Platzer, N.
Editor: Gupta, R.R.; Lechner, M.D.
Source: Landolt-Börnstein, New Series
Volume: III/35C4
Year: 2001
Keyword: Hydrogen 1; Nuclear Magnetic Resonance
ISBN: 3-540-41059-7
ISBN: 978-3-540-41059-1
Internet Resource: DOI:10.1007/b76570
RefComment: VII, 299 pages. With CD-ROM. Hardcover
Abstract: This volume provides a comprehensive and evaluated compilation of nuclear magnetic resonance data. Chemical shifts and coupling constants of boron-11 and phosphorus-31 (subvol. A), fluorine-19 and nitrogen-15 (subvol. B), hydrogen-1 (subvol. C), and carbon-13 (subvol. D) compounds are tabulated together with the gross- and structure formulas and the most readily available solvents. Due to the large amount of the data merely chemical shifts are presented in the printed versions, and all the data, chemical shifts and coupling constants are provided on CD-ROM's.
{uni_hamburg} Short: III/35D5
Title: Nuclear Magnetic Resonance (NMR) Data: Chemical Shifts for Carbon-13, Part 5: Organometallic Compounds
Author: Mikhova, Bozhana
Editor: Gupta, R.R.; Lechner, M.D.
Source: Landolt-Börnstein, New Series
Volume: III/35D5
Year: 2008
Keyword: Carbon-13; chemical shift; magnetic properties of nuclei; nuclear magnetic resonance data
ISBN: 978-3-540-74188-6 (print)
ISBN: 978-3-540-74189-3 (electronic)
Internet Resource: DOI:10.1007/978-3-540-74189-3
RefComment: VIII, 241 p., Hardcover
RefComment: Written for Scientists and engineers in the fields of physics, chemistry and physical chemistry who intend to use NMR to study the structure and the binding of molecules
Abstract: Nuclear Magnetic Resonance (NMR) is based on the fact that certain nuclei exhibit a magnetic moment, oriented by a magnetic field, and absorb characteristic frequencies in the radiofrequency part of the spectrum.